Shape and Functional Elements of the Bulk Silicon Microtechnique

Shape and Functional Elements of the Bulk Silicon Microtechnique

4.11 - 1251 ratings - Source



A Manual of Wet-Etched Silicon Structures Joachim FrA¼hauf ... [gem] 6 6 6 1016 1019 1015 Melting p 14 1460 1185 2046 (1500) (530) Ts [AdC] Temperat 15 400- 400 1700- 1000- 450durability 900 1850 1100 500 Tmax [AdC] Dielectric 9.8-9.9anbsp;...


Title:Shape and Functional Elements of the Bulk Silicon Microtechnique
Author: Joachim Frühauf
Publisher:Springer Science & Business Media - 2005-12-05
ISBN-13:

You must register with us as either a Registered User before you can Download this Book. You'll be greeted by a simple sign-up page.

Once you have finished the sign-up process, you will be redirected to your download Book page.

How it works:
  • 1. Register a free 1 month Trial Account.
  • 2. Download as many books as you like (Personal use)
  • 3. Cancel the membership at any time if not satisfied.


Click button below to register and download Ebook
Privacy Policy | Contact | DMCA